Towards control of plasma-induced surface roughness: simultaneous to plasma etching deposition

Evolution of surface roughness of AlN and GaN induced by inductively coupled Cl2 ÕAr plasma etching

We study the effects of plasma etching on the evolution of surface roughness of GaN and AlN. The etch-induced roughness is investigated using atomic force microscopy by systematically varying plasma power, chamber pressure, and Cl2 /Ar mixture gas composition. GaN etches three to four times more rapidly than AlN for identical plasma conditions. For both GaN and AlN, we find that the surface rou...

Surface chemistry during plasma etching of silicon

Angle-resolved x-ray photoelectron spectroscopy ( X P S ) and laserinduced thermal desorption (LD), combined with laser-induced fluorescence (LIF) detection, were used to study the etching of olycrystalline Si (poly-Si) and single crystal Si(lO0) in high density (1-2 x 10fl ions/cm3), low presswe (0.510 mTorr) C12MBr-containing, helical resonator plasmas. The XPS measurements on both unmasked S...

Using Neural Networks To Control The Process of Plasma Etching and Deposition

Neural architectures are proposed to model and control plasma etching and deposition processes in semiconductor wafer manufacturing. Static and dynamic neural networks are used to develop plant models and inverse models. A single-hidden layer feedforward neural network model learns to identify the system’s input-output relationship. Another single-hidden layer feedforward neural controller lear...

Surface Reaction Mechanisms in Plasma Etching Processes By

Formation of plasma induced surface damage in silica glass etching for optical waveguides

Ge, B, P-doped silica glass films are widely used as optical waveguides because of their low losses and inherent compatibility with silica optical fibers. These films were etched by ICP !inductively coupled plasma" with chrome etch masks, which were patterned by reactive ion etching !RIE" using chlorine-based gases. In some cases, the etched surfaces of silica glass were very rough !root-mean s...